Year: 2005
Type: article
Abstract: To meet increasingly demanding performance requirements, the microelectronics industry is required to deliver new technology solutions that will include new device architectures, ever-smaller feature dimensions, new high-performance materials, and novel processing schemes.
DOI: 10.1149/2.f06052if
Authors: Stephen Beaudoin, Shaun Graham, Ravi Jaiswal, Caitlin Kilroy, Brum Soo Kim, Gautam Kumar, Shanna Smith
Institution: Purdue University West Lafayette
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2467461968