Work

Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators

Year: 2016

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2016.2586099

Authors: Yushi Yang, Eldwin J. Ng, Pavel M. Polunin, Yunhan Chen, Ian B. Flader, Steven W. Shaw, Mark I. Dykman, Thomas W. Kenny

Institutions: Stanford University, Michigan State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Defense Advanced Research Projects Agency

Awards: G4324654288, Renewal Proposal for the National Nanofabrication Users Network

OpenAlex ID: W2467920335

FWCI: 3.076

Cites: 31

Cited by: 59

Related to: 10