Work

Fabrication of High Aspect Ratio SiO2and Tempax Glass Pillar Structures and Its Application for Optical Modulator Device

Year: 2016

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2016.2581184

Authors: Nguyen Van Toan, Suguru Sangu, Takahito Ono

Institutions: Tohoku University, Ricoh (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Tohoku University, Japan Society for the Promotion of Science

Award: Resonant Photoacoustic Sensor

OpenAlex ID: W2467951303

FWCI: 0.429

Cites: 27

Cited by: 17

Related to: 10