Work

Experimental and Numerical Analysis of Slurry Flow in Chemical Mechanical Polishing

Year: 2008

Type: article

Source: Journal of the Korean Physical Society

DOI: 10.3938/jkps.53.2129

Authors: Youngbin Yoon, Mirza Baig, Dohyung Lee

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2473995083

FWCI: 2.291

Cites:

Cited by: 9

Related to: 10