Analysis and Simulation of MEMS Based Multiple Gases Detection System Using COMSOL
Year: 2014
Type: article
Abstract: In the recent past, there have been a number of researches on integrated gas sensors tailored for various applications such as disease detection, pollution monitoring and many more. Most of the previous designs were based on the micro-array type. However, this could significantly consume huge space on the substrate. With an interest of providing a cost effective solution, a novel micro/nano engineered gas sensing chamber has been designed. In this paper, the mathematical model of the gas detection mechanism for the evaluation of the system performance has been discussed. The model has been optimized for high sensitivity operation and the optimal velocity of the gas flow in the chamber has been found to be 2e-5 m/s for NO2 and H2 in air of concentrations 100 ppm and 2000 ppm respectively, at 50°C.
Institution: Birla Institute of Technology and Science, Pilani
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W248090174