Work

Fabrication of Microoptics with Plasma Etching Techniques

Year: 2009

Type: book-chapter

Source: CRC Press eBooks

DOI: 10.1201/9781420019148-c2

Author: Gregg Borek

Language: English

Topic: Advanced optical system design

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2493701196

FWCI: 1.528

Cites: 21

Cited by: 2

Related to: 10