Work

Process improvements in the production of silicon immersion gratings

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2233388

Authors: Cynthia B. Brooks, Benjamin Kidder, Michelle Grigas, Ulf Griesmann, Daniel W. Wilson, Richard E. Muller, Daniel T. Jaffe

Institutions: The University of Texas at Austin, National Institute of Standards and Technology, Jet Propulsion Laboratory

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Aeronautics and Space Administration, National Institute of Standards and Technology

OpenAlex ID: W2500907508

FWCI: 3.72

Cites: 7

Cited by: 10

Related to: 10