Work

Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

Year: 2016

Type: conference-paper

Abstract: The dynamic response of a MEMS accelerometer can be influenced by several multi-physics effects, especially if the gaps between the shuttle and the stator attain sub-micrometric values. The present paper aims at tackling the aforementioned issues by means of a suitable experimental procedure, which has been purposely devised for the problem at hand, and through the execution of numerical analyses (based on the Finite Element Model). The effect of parasitic electrostatic forces and hydrodynamic forces is clearly demonstrated.

Source: Procedia Engineering

DOI: 10.1016/j.proeng.2016.11.318

Authors: Raffaele Ardito, Biagio De Masi, Fabrizio Cerini, Marco Ferrari, Vittorio Ferrari, Alfio Russo, Mikel Azpeitia Urquia, René I.P. Sedmik

Institutions: Politecnico di Milano, University of Brescia, STMicroelectronics (Italy), Vrije Universiteit Amsterdam

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W2568059552

FWCI:

Cites: 3

Cited by: 1

Related to: 10