Work

Vapor deposition: The first hundred years

Year: 1965

Type: article

Source: JOM

DOI: 10.1007/bf03378363

Authors: E. M. Sherwood, J. M. Blocher

Institution: Battelle

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2579397202

FWCI:

Cites: 28

Cited by: 3

Related to: 10