Work

Current Stage of the Investigation of the Composition of Oxygen Precipitates in Czochralski Silicon Wafers

Year: 2017

Type: article

Abstract: In this work, we look on the current stage of the investigation of the composition of oxygen precipitates obtained with the help of different techniques. Moreover, we present our recent and new investigation of the composition of oxygen precipitates carried out by means of energy dispersive X-ray spectroscopy, electron energy loss spectroscopy, and Fourier transform infrared spectroscopy. The FTIR spectra measured at liquid helium temperature are compared with the spectra simulated on the basis of experimental results obtained by scanning transmission electron microscopy. According to the results obtained by all methods the precipitated phase of plate-like as well as octahedral precipitates is close to SiO 2 .

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2.0081704jss

Authors: D. Kot, G. Kissinger, M. A. Schubert, A. Sattler

Institution: Leibniz Institute for High Performance Microelectronics

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $1,950

OpenAlex ID: W2584034879

FWCI: 0.781

Cites: 39

Cited by: 13

Related to: 10