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Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

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Year: 2017
Type: conference-paper
Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
DOI: 10.1117/12.2253983
Authors: Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, Yasuyuki Tsuboi
Institutions: The University of Osaka, National Institute of Advanced Industrial Science and Technology, Osaka City University
Language: English

Topic: Laser Material Processing Techniques
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: Amada Foundation, Japan Society for the Promotion of Science
Award: Develpment of a technique to transfer nanodot in lattice with homo- hetero- and nanogap
OpenAlex ID: W2594443409
FWCI: 2.703
Cites: 4
Cited by: 20
Related to: 10
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