Work

Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher

Year: 2014

Type: article

Authors: Jieyang Jia, Zhao Li, Mary Tang, J.P. McVittie

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2594892445

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