Work

The holistic method of the surface structure characterization

Year: 2016

Type: conference-paper

Source: International Baltic Conference on Atomic Layer Deposition (BALD)

DOI: 10.1109/bald.2016.7886525

Authors: Vladimir N. Petrushin, Yuriy V. Rudyak, Georgy O. Rytikov

Institution: Moscow Polytechnic University

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2598058768

FWCI: 0.403

Cites: 15

Cited by: 5

Related to: 10