Work

Properties of W-Ge-N as a diffusion barrier material for Cu.

Year: 2005

Type: article

Source: Bulletin of the American Physical Society

Authors: S. Rawal, D. P. Norton, Tim Anderson, Lisa McElwee‐White

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2602736016

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