Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method
Year: 1989
Type: article
Source: MRS Bulletin
Authors: J.V. Mantese, A.L. Micheli, A.H. Hamdi, R.W. Vest
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2605115964
