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Formation of Low-Resistivity Nickel Germanide Using Atomic Layer Deposited Nickel Thin Film
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Year:
2017
Type:
article
Source:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2017.2694456
Authors:
Hyun Jun Ahn,
Jungmin Moon,
Yujin Seo,
Tae In Lee,
Choong-Ki Kim,
Wan Sik Hwang,
Hyun-Yong Yu,
Byung Jin Cho
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Institutions:
Korea Advanced Institute of Science and Technology,
Korea Aerospace University,
Korea University
Language:
English
Topic:
Semiconductor materials and interfaces
Subfield:
Electronic, Optical and Magnetic Materials
Field:
Materials Science
Domain:
Physical Sciences
Open Access status:
closed
OpenAlex ID:
W2607528792
FWCI:
1.032
Cites:
21
Cited by:
16
Related to:
10