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Hydrogen thermal reductive Cu nanowires in low temperature Cu–Cu bonding

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Year: 2017
Type: article
Source: Journal of Micromechanics and Microengineering
DOI: 10.1088/1361-6439/aa74fb
Authors: Li Du, Tielin Shi, Lei Su, Zirong Tang, Guanglan Liao
Institutions: State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Jiangnan University
Language: English

Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China
Awards: G1030087181, G7380912960
OpenAlex ID: W2619258617
FWCI: 0.447
Cites: 29
Cited by: 10
Related to: 10
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