Work

Differences in reliability effects for thick copper and thick aluminium metallizations

Year: 2017

Type: conference-paper

Source: IEEE International Reliability Physics Symposium proceedings

DOI: 10.1109/irps.2017.7936377

Authors: Martin Pohl, Marco Erstling, Verena Hein, K. Weide-Zaage, T. Chen

Institutions: X-Fab (Germany), Leibniz University Hannover

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2620728016

FWCI:

Cites: 1

Cited by: 3

Related to: 10