Work

Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method

Year: 2017

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.4985621

Authors: Benmeng Wei, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu

Institutions: Hefei University of Technology, University of Science and Technology of China, National Synchrotron Radiation Laboratory

Language: English

Topic: Anodic Oxide Films and Nanostructures

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G7460969764

OpenAlex ID: W2625824801

FWCI: 0.53

Cites: 12

Cited by: 7

Related to: 10