Year: 2007
Type: conference-paper
Abstract: In recent years, the superprecision positioning is necessary and indispensable in the almost every precision technical field. For miniaturization and making instrument to higher accuracy applying super precision techniques are also needed in other industries; the biology fields, etc. The rotation type actuator is mentioned which is a minute, driving device by the use of a piezo-electric element and inertia force. Theoretical equation: inertia power, torsion, displacement are obtained by solid physics theory, and 103.2 (arc. second) rotation has been done in as much as 55 minutes.
Authors: Naotoshi NISHIKAWA, Nobuhiro TSUDA
Institution: Tokai University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2717469217