Work

Micro-actuator research at the Transducers Technology Group

Year: 2001

Type: conference-paper

Source: University of Twente Research Information

Authors: A.A. Kuijpers, S. Deladi, S. Saravanan, Gijs Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.W. Berenschot, Michael Curt Elwenspoek, Edin Sarajlic

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2741698643

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Related to: 10