Towards electro-optical integration of hybrid III-V on Si lasers into the BEOL of a CMOS technology
Year: 2017
Type: conference-paper
Source: Conference digest
Institution: IBM Research - Zurich
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Horizon 2020 Framework Programme
OpenAlex ID: W2745142245
