Work

Study of Rectangular Diaphragm-Microelectromechanical Systems Optical Pressure Sensor

Year: 2017

Type: article

Source: Journal of Computational and Theoretical Nanoscience

DOI: 10.1166/jctn.2017.6641

Authors: T Sripriya, V Jeyalakshmi

Institutions: Sathyabama Institute of Science and Technology, Anna University, Chennai

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2745336237

FWCI:

Cites:

Cited by: 4

Related to: 10