Micro-Raman and FTIR Analysis of Silicon Carbo-Nitride Thin Films at Different H2 Flow Rate
Year: 2017
Type: book-chapter
Authors: Dhruva Kumar, Umesh Rizal, Soham Das, Bhabani S. Swain, Bibhu Prasad Swain
Institutions: Sikkim Manipal University, Kookmin University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2766374591