Standardisierung von Dünnschichten
Year: 2018
Type: article
Authors: Jan Gäbler, Jürgen Becker, Peter Feuchter, Daniel Hinzmann, Janine Winkler, Josefa Wolf
Language: German
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2786239221
