Work

Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators

Year: 2018

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

DOI: 10.1109/isiss.2018.8358124

Authors: Michael Maurer, Stefan Rombach, Yiannos Manoli

Institutions: Hahn-Schickard-Gesellschaft für angewandte Forschung, University of Freiburg

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2802299952

FWCI: 0.799

Cites: 7

Cited by: 2

Related to: 10