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MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues

Year: 2018

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2018.2837143

Authors: Germano Nicollini, Daniele Devecchi

Institution: STMicroelectronics (Italy)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2803198736

FWCI: 0.86

Cites: 7

Cited by: 23

Related to: 10