Work

Study of piezo-electric film deposition by DC sputtering with two sputtering sources-2

Year: 2017

Type: conference-paper

Abstract: should be 100 to 150 words, use Times 9 point. English abstract should be written here. English abstract should be written here. English abstract should be written here. English abstract should be written here. English abstract should be written here. English abstract should be written here. English abstract should be written here.

Source: The Proceedings of the Symposium on Micro-Nano Science and Technology

DOI: 10.1299/jsmemnm.2017.8.pn-18

Authors: Junji Sone, Yasuyoshi Matsumoto, Syogo Kutsuzawa, Yoji Yasuda, Yoich Hoshi

Institution: Tokyo Polytechnic University

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W2803586005

FWCI: 1.074

Cites:

Cited by: 1

Related to: 10