Work

A Novel Design for Enhancing the Sensitivity of a Capacitive MEMS Device

Year: 2018

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2018.2842429

Authors: Mithlesh Kumar, Banibrata Mukherjee, Kenkere Balashantha Murthy Mruthyunjaya Swamy, Siddhartha Sen

Institutions: Indian Institute of Technology Kharagpur, National Institute of Technology Rourkela, Indian Institute of Science Bangalore

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Indian Institute of Technology Kharagpur

OpenAlex ID: W2807908282

FWCI: 0.574

Cites: 19

Cited by: 13

Related to: 10