Work

Diffuse scattering of lamellar optical gratings due to line edge roughness

Year: 2018

Type: conference-paper

Source: Optical Fabrication, Testing, and Metrology

DOI: 10.1117/12.2314579

Authors: Martin Heusinger, Michael Banasch, Dirk Michaelis, Thomas Flügel-Paul, Uwe D. Zeitner

Institutions: Vistec Electron Beam (Germany), Fraunhofer Institute for Applied Optics and Precision Engineering

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2808056282

FWCI:

Cites: 26

Cited by:

Related to: 10