Work

Ab initio molecular dynamics of atomic-scale surface reactions: insights into metal organic chemical vapor deposition of AlN on graphene

Year: 2018
Type: article
Abstract: ) THz via Arrhenius linear regression. The results demonstrate that AIMD simulations enable understanding complex precursor/surface reaction mechanisms, and thus propose AIMD to become an indispensable routine prediction-tool toward more effective exploitation of chemical precursors and better control of MOCVD processes during synthesis of functional materials.
Language: English
Open Access status: hybrid
OpenAlex ID: W2808296014
FWCI: 5.218
Cites: 57
Cited by: 96
Related to: 10