Work

Laser diagnostics of silicon chemical vapor deposition: In situ measurements and comparisons with model predictions

Year: 1987

Type: article

Source: OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Authors: W.G. Breiland, P Shing Ho, Michael E. Coltrin

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W287720105

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