Work

Degenerate and non-degenerate In2O3 thin films by pulsed electron beam deposition

Year: 2018

Type: article

Source: Materials Science in Semiconductor Processing

DOI: 10.1016/j.mssp.2018.07.024

Authors: M. Nistor, F. Gherendi, J. Perrière

Institutions: National Institute for Laser Plasma and Radiation Physics, Centre National de la Recherche Scientifique, Institut des NanoSciences de Paris, Université Pierre-et-Marie-Curie

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministerul Cercetării şi Inovării

OpenAlex ID: W2883178201

FWCI: 1.244

Cites: 52

Cited by: 25

Related to: 10