Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor
Year: 2018
Type: article
Abstract: A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.
Source: Nanoscale
DOI: 10.1039/c8nr04665d
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $1,242
Awards: G4512790425, G8128490010
OpenAlex ID: W2883684698
