Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films
Year: 2015
Type: conference-paper
Abstract: We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM).
DOI: 10.1117/12.2178765
Institution: Leibniz University Hannover
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W288485079
