Work

Growth assessment and scrutinize dielectric reliability of c-axis oriented insulating AlN thin films in MIM structures for microelectronics applications

Year: 2018

Type: article

Source: Materials Chemistry and Physics

DOI: 10.1016/j.matchemphys.2018.08.013

Authors: Shuvam Pawar, Kirandeep Singh, Shubham Sharma, Akhilesh Pandey, Shankar Dutta, Davinder Kaur

Institutions: Indian Institute of Technology Roorkee, Solid State Physics Laboratory

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Defence Research and Development Organisation, Department of Science and Technology, Government of West Bengal

Award: G2867451263

OpenAlex ID: W2887979697

FWCI: 1.498

Cites: 49

Cited by: 38

Related to: 10