Work

Thermoelectric properties of epitaxial Ge thin films on Si(001) with strong crystallinity dependence

Year: 2018
Type: article
Abstract: The thermoelectric properties of epitaxial Ge films on Si(001) substrates were investigated, where the film crystallinity was controlled using various growth techniques established in large-scale integration research. The films exhibited substantially lower thermal conductivities than that of bulk Ge. Unlike carrier mobility with strong crystallinity dependence, the Seebeck coefficient was similar to the high bulk value and exhibited less crystallinity dependence. This demonstrates that inherently high-carrier-mobility Ge films with high crystallinity can exhibit reduced thermal conductivity and a high thermoelectric power factor simultaneously, leading to the realization of thermoelectric films on Si for reusing low-temperature waste heat from Si-based electronic devices.
Language: English
Open Access status: bronze
OpenAlex ID: W2898274696
FWCI: 0.524
Cites: 37
Cited by: 15
Related to: 10