Work

A 200-nm-gap Titanium Nitride Composite CMOS-MEMS CMUT for Biomedical Ultrasounds

Year: 2018

Type: conference-paper

Source: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

DOI: 10.1109/fcs.2018.8597500

Authors: Tzu-Hsuan Hsu, Chao-Yu Chen, Chun-You Liu, Ming-Huang Li, Shenz-Shian Li

Institutions: National Tsing Hua University, University of Illinois Urbana-Champaign

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2910071942

FWCI: 4.904

Cites: 8

Cited by: 8

Related to: 10