Work

Effects of Chemical Mechanical Polishing on the Laser Induced Damage Threshold of ZnGeP 2

Year: 2014
Type: conference-paper
Abstract: It is known that laser-induced damage in ZnGeP2 single crystals always initiates at the surfaces rather than in the bulk, making the surface preparation of major importance. We studied two chemical mechanical polishing processes. Peak to valley flatness and laser-induced damage threshold were analyzed and compared to commercial polish results.
Source: HAL
Language: English
Open Access status: green
OpenAlex ID: W2910537331
FWCI:
Cites:
Cited by: 1
Related to: 10