Corporate Responsibility: A Green Initiative to Reduce Chlorobenzene Based Chemistries in Semiconductor Processing
Year: 2019
Type: article
Source: MRS Advances
DOI: 10.1557/adv.2019.20
Authors: Monique J. Farrell, Kevin Frey, John Mason
Institution: Northrop Grumman (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2910977005