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Breakthroughs in 3D Sequential technology

Year: 2018
Type: conference-paper
DOI: 10.1109/iedm.2018.8614653
Authors: L. Brunet, C. Fenouillet-Beranger, P. Batude, S. Beaurepaire, F. Ponthenier, N. Rambal, V. Mazzocchi, J-B. Pin, P. Acosta-Alba, S. Kerdiles, P. Besson, H. Fontaine, T. Lardin, F. Fournel, V. Larrey, F. Mazen, V. Balan, C. Morales, C. Guerin, V. Jousseaume, X. Federspiel, D. Ney, X. Garros, A. Roman, D. Scevola, P. Perreau, F. Kouemeni-Tchouake, L. Arnaud, C. Scibetta, S. Chevalliez, F. Aussenac, J. Aubin, S. Reboh, F. Andrieu, S. Maitrejean, M. Vinet
Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Applied Materials (United States), STMicroelectronics (France), Laser Systems & Solutions of Europe (France)
Language: English
Open Access status: closed
OpenAlex ID: W2913596336
FWCI: 11.61
Cites: 2
Cited by: 55
Related to: 10