Adaptive-angle scanning method for 3D measurement with atomic force microscopy
Year: 2019
Type: article
Authors: Rui Zhang, Sen Wu, Lu Liu, Xing Fu, Si-Tian Gao, Xiao-Dong Hu
Institutions: Tianjin University, National Institute of Metrology
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Award: G4691942197
OpenAlex ID: W2931287830