Work

A Computational Piezoelectric Micro-Machined Ultrasonic Transducer Toward Acoustic Communication

Year: 2019

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2019.2910174

Authors: Xinxin Liu, Dongyang Chen, Dengfei Yang, Xuying Chen, Xianhao Le, Jin Xie

Institutions: State Key Laboratory Fluid Power and Mechatronic Systems, Zhejiang University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Natural Science Foundation of China, Science Fund for Creative Research Groups, Natural Science Foundation of Zhejiang Province

Awards: G7242979491, 多模态可控MEMS谐振器及其在多级敏感谐振式传感器的应用, G860819630

OpenAlex ID: W2940407226

FWCI: 0.993

Cites: 16

Cited by: 19

Related to: 10