Work

Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition

Year: 2019

Type: article

Source: Technical Physics

DOI: 10.1134/s1063784219060082

Authors: N. V. Gavrilov, A. S. Kamenetskikh, D. R. Emlin, P. V. Tretnikov, A. V. Chukin

Institutions: Russian Academy of Sciences, Institute of Electrophysics, Ural Federal University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2954570860

FWCI: 0.181

Cites: 14

Cited by: 6

Related to: 10