Year: 2019
Type: conference-paper
Abstract: Pulsed laser deposition (PLD) is a versatile technique that can be used to produce thin-film crystalline materials. Here, we present the quantification of film quality improvements and the reduction of target LIPSS (laser induced periodic surface structure) obtained via the implementation of a bi-directional ablation technique. We demonstrate a tenfold reduction in particulate density, twofold reduction in surface roughness, and a fivefold reduction to waveguide losses in YGG (yttrium gallium garnet) films.
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2954940586
