Development of a simple cost-effective maskless-photolithography system
Year: 2019
Type: conference-paper
Source: AIP conference proceedings
DOI: 10.1063/1.5113058
Authors: S. Haldar, Geetanjali Vashisht, U. K. Ghosh, A. K. Jaiswal, S. Porwal, A. Khakha, T. K. Sharma, V. K. Dixit
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Homi Bhabha National Institute
OpenAlex ID: W2960426554