Review of applications of Defect Photoluminescence Imaging (DPLI) during IC processing
Year: 2019
Type: conference-paper
Authors: L. Jastrzebski, Roffarello, G. Nadudvari, Z. Kiss, I. Lajtos, A. Pongracz, G. Molnar, M. Nagy, L. Dudas, P. Basa, B. Greenwood, R. Duru, J. Gambino, D. Le-Cunff, M. Cannac, S. Joblot, I. Mica, M. L. Polignano, A. Galbiati, P. Monge
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2969349503