Work

Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection

Year: 2019

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2019.8808616

Authors: Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono

Institutions: Tohoku University, Micro System Integration Center, Tohoku University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2969948857

FWCI:

Cites: 6

Cited by: 1

Related to: 10