Work

Comparison of low damage sputter deposition techniques to enable the application of very thin a-Si passivation films

Year: 2019

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.5123836

Authors: Volker Linss, Martin Bivour, Hiroshi Iwata, Kai Ortner

Institutions: Fraunhofer Institute for Solar Energy Systems, Fraunhofer Institute for Surface Engineering and Thin Films, Von Ardenne (Germany), Keihin (Japan)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2971134824

FWCI: 3.168

Cites: 11

Cited by: 16

Related to: 10