An Examination of the Crystalline Quality of 200mm Diameter Silicon Substrates using X-ray Topography
Year: 1997
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-469-83
Institutions: Dublin City University, Philips (France), University of Freiburg
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsches Elektronen-Synchrotron
OpenAlex ID: W2978281317
